A Fast Scanner Design for a Scanning Multi-probe Microscope
نویسندگان
چکیده
OVERVIEW This abstract presents the design, performance evaluation and applications of a fast xy translation stage to create area scans of the optical spot in a metrological confocal microscope system. Scanning is achieved by moving the output of the fiber light source over an area of 60 x 60 μm that corresponds to a scan of around 5.2 μm of the spot size. The fiber scanner has a first mode resonance of 1.4 kHz and scans at rates of up to 80 lines per second are presented.
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تاریخ انتشار 2010